Practical limitations to accuracy in a nulling automatic wavelength-scanning ellipsometer

The limits of accuracy in an automatic wavelength-scanning ellipsometer are defined on the basis of measured mechanical properties of the instrument and the geometrical and optical defects of the optical components. A computational procedure is described for obtaining accurate Δ and ψ values by using a matrix model of the instrument, and the areás in which the greatest improvements in accuracy can be achieved are identified. © 1976.