Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The use of the t-BOC protecting group for the preparation of an organic soluble derivative of poly(vinyl alcohol) is reported. Poly(vinyl-t-butyl carbonate) can be obtained by free-radical polymerization of the monomer using peroxide or azo initiators at 90-120°C. The t-BOC polymer is thermolyzed cleanly to poly(vinyl alcohol) with evolution of carbon dioxide and 2-methyl-propene when heated to 210-220°C. The t-BOC polymer may be useful for imaging processes involving acid-catalyzed thermolysis. © 1987 Springer-Verlag.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R. Ghez, J.S. Lew
Journal of Crystal Growth
Robert W. Keyes
Physical Review B
A. Krol, C.J. Sher, et al.
Surface Science