Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A series of photocrosslinkable polymers bearing hyperpolarizable side chain chromophores was synthesized, poled and evaluated on the basis of the thermal stability of Second Harmonic Generation (SHG). Photoinitiation allowed for control of the onset of curing. Crosslinking was monitored by infrared spectroscopy and optimal conversion was achieved by applying a slow temperature ramp during exposure. The ultimate stability of the poled polymers was directly related to the number of crosslinking substituents that were attached to the chromophore pendant group. With two reactive groups per chromophore significant SHG was retained at temperatures above the initial polymer glass transition temperature. © 2014 Wiley Periodicals, Inc. J. Polym. Sci.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics