Conference paper
Isotropic treatment of EMF effects in advanced photomasks
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
We experimentally demonstrate single-monolayer sensitivity in a two-dimensional photonic crystal microcavity, for film-thickness biosensing. 3-D FDTD simulations are used to optimize for large wavelength shifts even when bio-material is coating only a portion of the device. © 2005 Optical Society of America.
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
Sanjay Kariyappa, Hsinyu Tsai, et al.
IEEE T-ED
S. Sidler, Irem Boybat, et al.
ESSDERC 2016
Alvaro Padilla, Geoffrey W. Burr, et al.
IEEE T-ED