Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Paper
Photoemission energy level measurements of sorbed gases on titanium
Abstract
Energy distributions at hν =21.2 eV show the energy levels and level widths of sorbed gases (H2, N2, CO, CO2 and O2) on Ti. CO and CO2 appear to dissociate into Ti/0 + Ti/C upon adsorption. Exposure to {greater-than or approximate} 10-4Torr sec of H2 and O2 results in the formation of Ti compounds on the surface. © 1972.