Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The authors consider a system composed of a random network of quasi-one-dimensional (1D) multichannel conductors. The zero- and finite-temperature (T) behaviour of the conductivity are studied, and the dependence on the impurity concentration ( eta ) is indicated. A very rich behaviour is found, depending on the various length scales of the problem. In general the conductivity of the system is 'classical' at high temperatures. At lower T it reflects 1D localisation effects, and then crosses over to a 3D regime. In some cases a percolative-type metal-insulator transition may take over. They indicate possible experimental realisations of their system.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Lawrence Suchow, Norman R. Stemple
JES
Ming L. Yu
Physical Review B
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering