Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
A universal method for representing solutions of the initial value problem ut = −2πiDu is presented for a large class of pseudo‐differential operators. The representations take the form of a path integral‐like operator. Three numerical approaches for evaluating these operators are treated. Practical interest in such universal methods depends on massively parallel computing systems. Copyright © 1990 Wiley Periodicals, Inc.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
M.B. Small, R.M. Potemski
Proceedings of SPIE 1989