Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
An amorphous Lennard-Jones solid has been severely deformed in a shearing manner by using computer molecular-statics techniques. The orientational order parameter Q6 is significantly increased before the onset of the shear localization. Computer-generated optical diffraction patterns show that a phase with explicit sixfold symmetry in one projection, and with fourfold and twofold symmetry in the other two projections (a tendency towards a close-packed layer structure) appears in the severely deformed system. The radial distribution functions, however, show no apparent crystallization occurring. © 1986 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
Lawrence Suchow, Norman R. Stemple
JES