Conference paperOptical measurement of internal logic patterns in a flip-chip mounted silicon SRAM integrated circuitH. Heinrich, N. Pakdaman, et al.LEOS 1992
PaperFuture beam-controlled processing technologies for microelectronicsDieter P. Kern, Thomas F. Kuech, et al.Science
Conference paperPerformance of In0.53Ga0.47As metal-semiconductor-metal photodetectors at 1.55 μmF. Tong, D.T. McInturff, et al.LEOS 1992
Conference paperFocussed excimer laser beams: A technique for selective micropatterningJean M. Hagerhorst, Modest M. OpryskoSPIE OE/LASE 1988
