Compression for data archiving and backup revisited
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
For large area liquid-crystal-displays (LCDs), hydrogenated amorphous silicon (a-Si) thin film transistors (TFTs) with large current drive are required. We have maximized the extrinsic TFT mobility on 550 mm × 650 mm large area glass substrates by optimization of n+ a-Si plasma enhanced-chemical vapor deposition (PE-CVD) conditions to minimize the TFT contact resistance. The contact resistance is measured using test element group (TEG) TFTs with different channel lengths. The resistance of contacts between source/drain electrode and a-Si layer affects the extrinsic mobility. © 1998 Elsevier Science Ltd. All rights reserved.
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
K.A. Chao
Physical Review B