Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
Martin C. Gutzwiller
Physica D: Nonlinear Phenomena
Chai Wah Wu
Linear Algebra and Its Applications