Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A unified interpretation is given for the infrared and optical spectra of many TCNQ compounds which exhibit a wide variety of physical properties. Inter- and intra-molecular transitions are distinguished by polarization measurements on single crystals of several TCNQ salts. It is suggested that there is incomplete charge transfers in both tetrathiofulvalinium (TTF)- and N-methylphenazinium (NMP)-TCNQ and that the electron-electron interactions are not appreciably screened by the excitonic polarizability of the cations. © 1993.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry