William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Paper
Optical, electrical and contact properties of homoCVD a-Si:H films
Abstract
The optical and electrical properties of undoped HOMOCVD a-Si films are strikingly similar to those of GD films obtained over the same substrate temperature range. The contact properties studies reveled that the metals with θm ≤ 4.3 eV form a Schottky diode while those with θm ≤ 4.3 eV form a quasi- or ohmic low resistance contact to undoped HOMOCVD a-Si films without a heavily doped layer at the interface. © 1985.
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