Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The frequency-dependent susceptibility has been calculated in a one-electron tight-binding approximation for a half-filled dimerized linear chain of finite extent. It is shown that at finite temperatures the interruption of a semiconducting strand could lead to significant absorption in the gap. This absorption is associated with intraband transitions that would normally be absent for an infinite strand and consequently could provide evidence for the presence of interrupted strands. © 1977.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Reisman, M. Berkenblit, et al.
JES
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000