Conference paper
Phase plates in the object plane for microlithography
M. Levenson
SPIE OE/LASE 1993
No abstract available.
M. Levenson
SPIE OE/LASE 1993
F.M. Schellenberg, M. Levenson
BACUS Symposium on Photomask Technology and Management 1992
G.J. Milburn, M. Levenson, et al.
Journal of the Optical Society of America B: Optical Physics
M. Levenson, R.M. Shelby, et al.
Physical Review Letters