Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
No abstract available.
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Lixi Zhou, Jiaqing Chen, et al.
VLDB
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MMSP 2007