Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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Different physical problems in one dimension are related to the recurrence relation, whose solution at most linearly increases with the length of the system. In particular, limitations on the universality relation in localization are presented; phonon localization length, spectrum, and eigenstates are determined. © 1983 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R. Ghez, J.S. Lew
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