William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
We have examined the various fundamental issues that are important for the accurate determination of the ionization probability as a function of the emission velocity. The different surface potentials encountered by the sputtered neutral atoms and the secondary ions respectively result in corrections to both the trajectories of the secondary ions and the phase space covered by the detector. © 1989, Taylor & Francis Group, LLC. All rights reserved.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Hiroshi Ito, Reinhold Schwalm
JES
Revanth Kodoru, Atanu Saha, et al.
arXiv
P.C. Pattnaik, D.M. Newns
Physical Review B