Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Zelen and Dannemiller [8] proposed a general life distribution function using a weighted sum of Laguerre polynomials (with non-constant weights). Their results are extended here by obtaining the distribution of the ratio of two random variables having this general life distribution. This result is used to examine the robustness of the two-sample exponential likelihood ratio test for comparing means. The test is found to be markedly nonrobust. © 1971, Taylor & Francis Group, LLC.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A. Skumanich
SPIE OE/LASE 1992
Matthew A Grayson
Journal of Complexity
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994