A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
Paper
On the deposition of amorphous silicon films from glow discharge plasmas of silane
Abstract
No abstract available.
Related
Ellen J. Yoffa, David Adler
Physical Review B
J.K. Gimzewski, T.A. Jung, et al.
Surface Science
T. Schneider, E. Stoll
Physical Review B