Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
No abstract available.
J. LaRue, C. Ting
Proceedings of SPIE 1989
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
Heinz Koeppl, Marc Hafner, et al.
BMC Bioinformatics