William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
T. Graham, A. Afzali, et al.
Microlithography 2000
Satoshi Hada
IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences