Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
We give a numerical criterion for a badly conditioned zero of a system of analytic equations to be part of a cluster of two zeros.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Yi Zhou, Parikshit Ram, et al.
ICLR 2023
A. Grill, B.S. Meyerson, et al.
Proceedings of SPIE 1989
Martin C. Gutzwiller
Physica D: Nonlinear Phenomena