Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
It has recently become feasible to compute information rates of finite-state source/channel models with not too many states. In this paper, we apply such methods to finite-state approximations of channels that are not finite-state. In this way, an upper bound and a conjectured lower bound on the information rate of the actual channel can be computed.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Sonia Cafieri, Jon Lee, et al.
Journal of Global Optimization
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009