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SPIE OE/LASE 1992
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SPIE OE/LASE 1992
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
Satoshi Hada
IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences
T. Graham, A. Afzali, et al.
Microlithography 2000