Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
No abstract available.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A.R. Conn, Nick Gould, et al.
Mathematics of Computation
Y.Y. Li, K.S. Leung, et al.
J Combin Optim
Peter Wendt
Electronic Imaging: Advanced Devices and Systems 1990