William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A. Grill, B.S. Meyerson, et al.
Proceedings of SPIE 1989
Ziv Bar-Yossef, T.S. Jayram, et al.
Journal of Computer and System Sciences
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002