Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Paper
Numerical evaluation of wiener integrals
Abstract
A systematic study of quadrature formulae for the Wiener integral ∫ F[x]w(dx) of the type ∫F[θ6(u, .) ]v(du) is presented. The Cameron and Vladimirov quadrature formulae, which are the function space analogues of Simpson’s Rule, are shown to fit into this framework. Numerical results are included. © 1967, AMS Publisher. All rights reserved.