Novel packaging structure and processes for micro-TFB (thin film battery) to enable miniaturized healthcare internet-of-things (IoT) devices

In this work, a novel packaging structure has been demonstrated for micro-TFB cells. Various semiconductor fabrication and assembly processes have been applied to thin substrate via formation and sealing, micro-TFB singulation and handling, as well as metallic sealing for hermetic battery packaging. Micro-TFB cells in the dimensions of 2.5mm x 2.5mm x 0.1mm have been fabricated and tested. A normalized capacity of ∼ 190 μAh/cm2 has been demonstrated.