Conference paper
Silicon photonics and challenges for fabrication
N. Feilchenfeld, Karen Nummy, et al.
SPIE Advanced Lithography 2017
We present a 4x4 spatially non-blocking Mach-Zehnder based ilicon optical switch fabricated using processes fully compatible with standard CMOS. We successfully demonstrate operation in all 9 unique switch states and 12 possible I/O routing configurations, with worst-case cross-talk levels lower than -9 dB, and common spectral bandwidth of 7 nm. High-speed 40 Gbps data transmission experiments verify optical data integrity for all input-output channels. © 2010 Optical Society of America.
N. Feilchenfeld, Karen Nummy, et al.
SPIE Advanced Lithography 2017
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