J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
In a critical evaluation, we show that existing classical potentials are not suitable for calculating the energy of realistic atomic processes in Si. We present a new potential which is especially suited to simulate processes in the diamond lattice rather than in high-energy bulk structures of Si. Our potential is based on a very large quantum-mechanical data base. It consists of two- and three-body terms with short-range separable forms, and reproduces accurately the energy surface for atomic exchange in Si. Thus, it is ideally suited for molecular dynamics simulations of atomic processes in Si. © 1988 The American Physical Society.
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
A. Reisman, M. Berkenblit, et al.
JES
Shiyi Chen, Daniel Martínez, et al.
Physics of Fluids
T.N. Morgan
Semiconductor Science and Technology