E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
No abstract available.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Robert W. Keyes
Physical Review B
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films