Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta
A report on the progress in nanofabrication technology was presented. The principles and limits of the various pattern formation techniques which have emerged as important tools in the research nanoscale devices and structures were discussed. Topics such as electron beam lithography, imprint lithography, proximal probes and self assembly were also discussed.
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films