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Photomask and Next-Generation Lithography Mask Technology 2004
A spherical harmonics expansion method of the Boltzmann Transport Equation (BTE) in the three-dimensional space is proposed. The method is quite general in terms of scattering matrix and band structure. We show a numerical application to a two-dimensional p-n junction. © 1992.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
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Foundations of Computational Mathematics