Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A microscopic, stochastic, minimal model for collective and cohesive motion of identical self-propelled particles is introduced. Even though the particles interact strictly locally in a very noisy manner, we show that cohesion can be maintained, even in the zero-density limit of an arbitrarily large flock in an infinite space. The phase diagram spanned by the two main parameters of our model, which encode the tendencies for particles to align and to stay together, contains non-moving "gas", "liquid" and "solid" phases separated from their moving counterparts by the onset of collective motion. The "gas/liquid" and "liquid/solid" are shown to be first-order phase transitions in all cases. In the cohesive phases, we study also the diffusive properties of individuals and their relation to the macroscopic motion and to the shape of the flock. © 2003 Elsevier Science B.V. All rights reserved.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Robert F. Gordon, Edward A. MacNair, et al.
WSC 1985
Sankar Basu
Journal of the Franklin Institute
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011