Conference paper
Charge trapping in high K gate dielectric stacks
Sufi Zafar, Alessandro Callegari, et al.
IEDM 2002
By use of a Monte Carlo technique, it is shown that high-field electron transport in the SiO2 conduction band is controlled by LO-phonon scattering for fields below 3 × 106 V/cm and by nonpolar scattering with acoustic phonons at higher fields. This accounts for recent experimental results indicating that an energy-loss mechanism, previously neglected, is effective at high fields. © 1984 The American Physical Society.
Sufi Zafar, Alessandro Callegari, et al.
IEDM 2002
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Microelectronics Journal
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Journal of Applied Physics
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Journal of Applied Physics