William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
A. Krol, C.J. Sher, et al.
Surface Science
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.