Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Preeti Malakar, Thomas George, et al.
SC 2012
Khalid Abdulla, Andrew Wirth, et al.
ICIAfS 2014
Elena Cabrio, Philipp Cimiano, et al.
CLEF 2013