Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper analyzes the influence of the deposition conditions (substrate temperature and oxygen flow) on the magnetic moment of Fe304 films grown by reactive RF sputtering. With conversion electron Mossbauer spectroscopy and transmission electron microscopy of specific microstructures we have identified different mechanisms which can contribute to the decrease of M in our samples: decrease of average grain size (superparamagnetism) and distortion of the lattice which may induce mispopulation of tetrahedral and octahedral sites and decrease of crystalline quality. © 1990, Materials Research Society. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
R.W. Gammon, E. Courtens, et al.
Physical Review B