Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Transmission electron microscopy has been used to investigate the microdeformation behavior of thermally imidized thermoplastic pyromellitic dianhydride/1,1‐bis(4‐amino‐phenyl)‐1‐phenyl‐2,2,2 trifluoroethylene (3FDA/PMDA) polyimide films with a Tg of ∼ 440°C, prepared by solution casting of a polyamic ester precursor. Failure of the films at room temperature was by unstable cracking at about 5% strain, accompanied by homogeneous shear deformation at the crack tips. As the temperature was raised to above 100°C, zones of mixed shear and crazing were observed, and a stick‐slip mode of cracking. Above about 300°C shear was once again the dominant deformation mechanism and the films became fully ductile. In films containing porosity on a scale of a few nanometers, prepared by thermal degradation/imidization of a 3FDA/PMDA/poly α‐methyl styrene graft copolymer, film failure at room temperature was also by unstable cracking, but a zone of multiple craze‐like features was observed at crack tips, rather than a single shear deformation zone. The increase in extent of this zone of craze‐like features as the temperature was raised was again associated with an increase in crack stability. ©1995 John Wiley & Sons, Inc. Copyright © 1995 John Wiley & Sons, Inc.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films