Julien Autebert, Aditya Kashyap, et al.
Langmuir
We have studied the reactions occurring for the deposition of chromium onto pyromellitic dianhydride-4,4-oxydianiline (PMDA-ODA) polyimide for a wide range of metal coverages, using x-ray photoelectron spectroscopy as well as solution studies of model compounds. A multistep, coverage-dependent mechanism is proposed which includes an initial electron transfer from Cr to PMDA-ODA, followed by formation of Cr-O and Cr-N polymer-bound intermediates. At higher metal coverage, Cr-oxides and Cr-nitrides are formed which may activate the polymer for subsequent formation of Cr-carbide. In the course of this work we have shown that similarities exist between the chemistry of metal atoms in condensed phases and the reactions occurring between metal atoms and surfaces. © 1988, American Vacuum Society. All rights reserved.
Julien Autebert, Aditya Kashyap, et al.
Langmuir
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
Lawrence Suchow, Norman R. Stemple
JES