Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The density of vibrational states in a fractal silica aerogel of Hausdorff dimension D≃2.4 has been determined using spin-echo neutron spectroscopy. A smooth phonon-fracton crossover is found with a fracton spectral dimension of {Mathematical expression}. This direct measurement of {Mathematical expression} near crossover agrees with a previous finding based on scaling Brillouin-spectroscopy results obtained with several samples. We also show that protons adsorbed in the gel vibrate with substantially higher amplitude than the silica matrix. © 1990 Springer-Verlag.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
Kigook Song, Robert D. Miller, et al.
Macromolecules
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications