Conference paper
Characterization of a next generation step-and-scan system
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Computational and data-handling algorithms are given for a matrix variational method designed for a broad class of problems in the quantum theory of electron-atom scattering. As implemented, the method is applicable to low energy elastic or inelastic electron scattering by a neutral atom of arbitrary shell structure. © 1973.
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SPIE Advanced Lithography 1998
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