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Isotropic treatment of EMF effects in advanced photomasks
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Computational and data-handling algorithms are given for a matrix variational method designed for a broad class of problems in the quantum theory of electron-atom scattering. As implemented, the method is applicable to low energy elastic or inelastic electron scattering by a neutral atom of arbitrary shell structure. © 1973.
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
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