John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
No abstract available.
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
Charles A Micchelli
Journal of Approximation Theory
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
George Markowsky
J. Math. Anal. Appl.