Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A previously developed theory of the magnetism of iron, based upon notion of a randomized exchange field, has now been applied to calculate the properties of nickel. We obtained a Curie temperature of 1200 K, about twice the observed value. The magnetization curve, the paramagnetic susceptibility (a Curie-Weiss law), and the distribution of spin lengths are also calculated. Both similarities and differences from the results of the iron calculations are noted. © 1981 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Imran Nasim, Melanie Weber
SCML 2024
A. Reisman, M. Berkenblit, et al.
JES