PaperMatrix spectroscopy of Ag, Ta, W, and Mo trapped in Ar and Xe using a triode sputtering sourceF. Schoch, E. KayThe Journal of Chemical Physics
PaperDielectric breakdown of polymer films containing metal clustersC. Laurent, E. Kay, et al.Journal of Applied Physics
PaperA method for increasing the etch-rate ratio of oxides to nonoxides in inert-gas ion milling processesU. Gerlach-Meyer, J.W. Coburn, et al.Journal of Applied Physics
PaperMetal-containing fluoropolymer films produced by simultaneous plasma etching and polymerization: Effects of hydrogen or oxygenE. Kay, A. Dilks, et al.Journal of Applied Physics
