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No abstract available.
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
J. Tersoff
Applied Surface Science
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007