PaperUltra-High-Speed Planar Germanium Transistors and Integrated CircuitsH.N. Yu, F.H. DillIEEE T-ED
PaperIOTA, a new computer controlled thin film thickness measurement toolK. Konnerth, F.H. DillSolid-State Electronics
Conference paperResist characterization: Procedures, parameters, and profilesM. Exterkamp, W. Wong, et al.Proceedings of SPIE 1989