G. Burks, F.H. Dill, et al.
Proceedings of the IEEE
No abstract available.
G. Burks, F.H. Dill, et al.
Proceedings of the IEEE
P.D. Robertson, F.W. Wise, et al.
Proceedings of SPIE 1989
F.H. Dill
ISSCC 1963
Michael G. Rosenfield, Douglas S. Goodman, et al.
Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena