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No abstract available.
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007