David B. Mitzi
Journal of Materials Chemistry
Paper
Low-Temperature Chemical Vapor Deposition of High-Purity Copper from an Organometallic Source
Abstract
No abstract available.
Related
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
J.K. Gimzewski, T.A. Jung, et al.
Surface Science
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990