S.M. Schramm, J. Kautz, et al.
IBM J. Res. Dev
While the effectiveness of surfactants in suppressing islanding in Si/Ge heteroepitaxial growth has been demonstrated in previous studies, the atomic scale growth processes have remained unknown. Here we present images of the growing Si(001)/Ge surface obtained with in situ low-energy electron microscopy. From our previous we conclude that surfactant-mediated growth of Ge on Si(001) proceeds by highly local Ge incorporation with minimum surface diffusion. We propose a new two-dimer correlated exchange mechanism to explain this unusual growth mode, as well as the absence of islanding at high Ge coverage. © 1992 The American Physical Society.
S.M. Schramm, J. Kautz, et al.
IBM J. Res. Dev
R.M. Tromp, M.C. Reuter
Physical Review B
M. Poppeller, E. Cartier, et al.
Applied Physics Letters
C. Pennington, M. Gaowei, et al.
APL Materials